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Author Contributions: Laxmi Karki Gautam primarily fabricated samples, collected and analyzed RTSE data, and analyzed ex situ SE data. Maxwell M. Junda fabricated samples and performed RTSE data collection and analysis. Hamna F. Haneef performed IR-SE measurements and data analysis. Robert W. Collins and Nikolas J.Podraza guided the experiment designand data analysis. LaxmiKarki Gautam andNikolas J. Podrazawrote the paperwith input fromMaxwellM. Junda,HamnaF.Haneef,andRobertW.Collins. Conflictsof Interest: Theauthorshavenoconflictof interest. Thefundingsponsorshadno role in the design of the study, in the collection, analyses, or interpretation of data; in the writingof themanuscript; andin thedecisiontopublish theresults. References 1. Robertson, J.Depositionmechanismofhydrogenatedamorphoussilicon. J.Appl. Phys. 2000, 87, 2608–2617. 2. Collins, R.; Ferlauto, A.; Ferreira, G.; Chen, C.; Koh, J.; Koval, R.; Lee, Y.; Pearce, J.; Wronski, C. Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystallinesiliconstudiedbyreal timespectroscopicellipsometry. Sol. EnergyMater. Sol. Cells 2003, 78, 143–180. 3. Robertson, J.Growthmechanismofhydrogenatedamorphoussilicon. J.Non-Cryst. Solids 2000, 266, 79–83. 4. Fujiwara,H.;Kondo,M.;Matsuda,A.Real-timespectroscopicellipsometrystudiesof the nucleation and grain growth processes in microcrystalline silicon thin films. Phys. Rev. B 2001, 63. 5. Schiff, E.A.; Deng, X. Amorphous silicon-based solar cells. In Handbook of Photovoltaic ScienceandEngineering;Luque,S.H.A.,Ed.;Wiley: NewYork,NY,USA,2003;pp.487–545. 6. Guha, S.; Cohen, D.; Schiff, E.; Stradins, P.; Taylor, P.; Yang, J. Industry-academia partnership helps drive commercialization of new thin-film silicon technology. Photovolt. Int. 2011, 134. Available online: http://citeseerx.ist.psu.edu/viewdoc/ download?doi=10.1.1.397.3368&rep=rep1&type=pdf (accessedon1September2011). 7. Koh, J.; Ferlauto, A.; Rovira, P.; Wronski, C.; Collins, R. Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane. Appl. Phys. Lett. 1999, 75, 2286–2288. 8. Matsui,T.; Sai,H.;Saito,K.;Kondo,M.High-efficiencythin-filmsiliconsolarcellswith improvedlight-soakingstability. Prog. Photovolt. Res. Appl. 2013, 21, 1363–1369. 9. Sai, H.; Matsui, T.; Matsubara, K.; Kondo, M.; Yoshida, I. 11.0%-Efficient thin-film microcrystalline silicon solar cells with honeycomb textured substrates. IEEE J. Photovolt. 2014, 4, 1349–1353. 10. Yan, B.; Yue, G.; Sivec, L.; Yang, J.; Guha, S.; Jiang, C.-S. Innovative dual function nc-SiOx:H layer leading to a >16% efficient multi-junction thin-film silicon solar cell. Appl. Phys. Lett. 2011, 99. 11. Rovira,P.;Ferlauto,A.;Koval,R.;Wronski,C.;Collins,R.;Ganguly,G.Real timeoptics ofp-typesilicondepositiononspecularandtexturedZnOsurfaces. InProceedingsof theConferenceRecordof theTwenty-EighthIEEEPhotovoltaicSpecialistsConference, Anchorage,AK,USA,15–22September2000;pp.772–775. 90